ISBN 9783843938952

978-3-8439-3895-2, Reihe Ingenieurwissenschaften

Malte Bartenwerfer
Automation Capabilities in the Nanorobotic Handling of Nanomaterials

189 Seiten, Dissertation Carl von Ossietzky Universität Oldenburg (2018), Hardcover, D4

Zusammenfassung / Abstract

The conventional miniaturization of electronics, sensors and microcomponents is reaching inherent technological limits, which could be overcome by the use of nanoscale materials and objects. However, the integration of nanoscale objects is a challenge, which can be solved with nanorobotic methods.

Although a fundamental understanding of the relevant forces on the nanoscale exists, almost all existing handling approaches are only individual solutions, which in particular hardly take into account the automation capabilities of the entire integration process.

The present contribution introduces methods that have been developed to enable a precise three-dimensional and automatable integration of nanoscale components.

The methods are demonstrated by means of two application studies in which integration accuracies of less than 100 nm and handling throughputs of approx. 1/min were achieved.