ISBN 978-3-8439-1680-6

978-3-8439-1680-6, Reihe Mikrosystemtechnik

Hutomo Suryo Wasisto
Direct-reading personal airborne nanoparticle detector based on micromechanical silicon cantilever resonators

250 Seiten, Dissertation Technische Universität Braunschweig (2014), Hardcover, A5

Zusammenfassung / Abstract

This dissertation discusses the research development of a novel low-cost wearable personal device based on microelectromechanical systems (MEMS) for real-time monitoring of exposure to airborne engineered nanoparticles (ENPs) in indoor workplaces. This cantilever-based airborne nanoparticle detector (CANTOR) combines the uses of miniaturized electrostatic aerosol sampler and piezoresistive resonant silicon cantilever mass sensor for collecting the ENPs from the airstream to the cantilever surfaces and measuring their mass concentration, respectively. Two generations of CANTORs (i.e., partially integrated CANTOR-1 and fully integrated CANTOR-2) are described in details corcerning their components and performances. Correspondingly, silicon cantilever resonators operated in kHz range with different geometries, detections, and actuations are fabricated using bulk micromachining methods.