ISBN 978-3-8439-2943-1

978-3-8439-2943-1, Reihe Messtechnik

Christian Schulz
Novel Sensor Concepts for Plasma Diagnostics

205 Seiten, Dissertation Ruhr-Universität Bochum (2016), Hardcover, A5

Zusammenfassung / Abstract

Plasma processes are crucial and belong to key enabling technologies for future innovations in research and development, especially in the field of plasma assisted deposition, cleaning, and sterilization. Yet, not only technical evolutions but also economical possibilities play a significant role in the application of plasmas and their diagnostics. Since the resulting product quality is directly affected by the plasma dependent process parameters, such as the plasma electron density, the collision frequency, and the electron temperature, plasma diagnostics are indispensable for an effective feedback control loop of a process.

The work at hand starts where universal diagnostic concepts are missing. It is focussed on novel probe concepts suitable for the versatile demands of industrial plasma processes. Therefore, different probe concepts are presented and discussed. All are based on the concept of active plasma resonance spectroscopy and its optimal approach, the multipole resonance probe.

Compared to theory and existing diagnostic tools, excellent results are achieved. With regard to the demands of industrial processes and the derived requirements, the presented novel sensor concepts represent an auspicious contribution to plasma diagnostics.