ISBN 978-3-8439-4901-9

978-3-8439-4901-9, Reihe Elektrotechnik

Andi Setiono
Parasitic-crosstalk elimination in electrothermal piezoresistive cantilever resonators for real-time frequency–tracking operation

137 Seiten, Dissertation Technische Universität Braunschweig (2021), Hardcover, A5

Zusammenfassung / Abstract

This dissertation discusses research developments about strategies to mitigate a feedthrough current, which generates parasitic effects on the EPC resonance sensor’s frequency response. A close arrangement of a (thermal) actuation element to a sensing element embedded in the EPC sensor, resulting in a crosstalk effect, which presents a non-ideal frequency dependence of amplitude and phase response. Therefore, the development of several optimization methods has been conducted on such electronic measurement systems to realize preferably ideal frequency responses intended for real-time resonant-frequency tracking measurements using a phase-locked loop (PLL) technique. The proposed optimization methods to minimize or even eliminate the “parasitic agent” coupled in the EPC sensors presented in this work are thermal suppression, the performance of the 2nd harmonic actuation, and external parasitic feedthrough subtraction. Due to the best effectiveness and feasibility for PLL-based real-time measurement systems, parasitic feedthrough subtraction (PFS) is favored to be employed for optimizing the resonance responses and further implemented in future designs. The PFS method can easily be applied to EPC sensors under various non-optimized conditions and provides a range of up to ± 3 kHz for resonance tracking at around 200 to 300 kHz using the PLL setup.