ISBN 978-3-86853-941-7

978-3-86853-941-7, Reihe Mikrosystemtechnik

Winfred J. Kuipers
Design, Fabrication and Characterization of a MEMS-Based Counter-Current Flame Ionization Detector

152 Seiten, Dissertation Technische Universität Hamburg-Harburg (2011), Softcover, A5

Zusammenfassung / Abstract

This work describes the development of a MEMS-based counter-current flame ionization detector (cc-µFID). FEM simulations are used for design optimization, fabrication relies on standard silicon-glass micro-technology, and FID performance is characterized as a function of micro-burner geometry, gas flow, sample concentration, and mode of sample supply.