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978-3-8439-3091-8, Reihe Physik
Nadine Wehmeier Fabrication and analysis of co-diffused n-type silicon solar cells applying plasma-deposited diffusion sources
129 Seiten, Dissertation Universität Hannover (2016), Softcover, A5
The processing of n-type silicon solar cells can be significantly simplified by applying a multifunctional plasma-deposited boron diffusion source and a co-diffusion process. Thus, high-temperature furnace diffusions as well as deposition and etching steps can be reduced and solar cells can be fabricated more cost- and time-efficiently. In this work, the plasma-enhanced chemical vapor deposition (PECVD) of boron silicate glass (BSG) which is used as a single-sided solid diffusion source is optimized. A novel cell concept based on n-type silicon named Bifacial Co-diffused Rear Emitter (BiCoRE) is presented. The first BiCoRE cells reach 20.6% efficiency and 78% bifaciality.